Development

TNO, together with 23 EU partners is running the actphast project. ACTPHAST provides photonics...

Since 2000 TNO has been active in EUV material interaction research, developing the 2nd generation EUV exposure and in-situ surface analysis facility – dubbed EBL2 – to accommodate the ASML power roadmap. This system will give customers the opportunity to evaluate their materials/components in terms of NXE-relevant EUV irradiation and environmental conditions in order to address contamination and lifetime challenges.