Silvania Pereira

TU Delft
Group
Optics
Faculty
TNW
Email

About

Silvania Pereira

My research topics are optical metrology and vectorial optics. In optical metrology, we develop non-destructive optical methods aiming both for inspection of printed wafers for the semiconductor industry and contamination on surfaces due to very small nanoparticles (< 100 nm).  The latter has applications in quality control of wafers as well as plastic or glass substrates for solar cells, OLEDs. In the area of vectorial optics, we work on the development of high resolution optical systems based on nonconventional polarisation states of light such as radial and azimuthal polarisation and we also explore other properties of light such as angular momentum in order to improve the optical systems for imaging and inspection.

Scatterometer for wafer inspection Optics Lab at VLL, TU Delft
Signal corresponding to optical nondestructive detection of a 50 nm polystyrene particle on a wafer

 

Design of a mini scatterometer (3D printed) for detection of nanoparticles

 

Scientific interests

  • Optical metrology
  • High resolution optical systems

Expertise:

  • Development of optical instruments for optical metrology and quantum optics
  • Experiments and modelling of vectorial optical systems
  • Development of detection methods for optical measurements

Models and equipment:

  • Optical setups for imaging and inspection
  • Homemade and commercial high resolution microscopes (confocal and near field)
  • Electromagnetic field modelling
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