Stefan Bäumer

TNO
Group
Optics
Faculty
TNO Industry
Email

About

Stefan Bäumer

One of the main drivers in the semiconductor industry is shrinkage – the race for smaller and smaller features. In chip manufacturing the smallest contamination particles can make a product useless. To prevent this, it is essential to be able to detect particles of around 20 nanometres or less. TNO has developed a special scanner, the Rapid Nano, which can detect such small particles.

The Rapid Nano is an affordable tool for particle inspection of EUV blank reticles and reticle substrates (152 x 152). The Rapid Nano is suitable for scanning the complete surface of a blank reticle in a protective scanbox. The inspection system makes use of a double dark-field concept whereby information is recorded by a high-definition camera. The data is stored as raw image format and is made available for off-line data processing and reviewing. The solution has particular many benefits. Nanometre particles are scanned in the patented clean box at a velocity of 100 cm2 per hour. Moreover, the solution can be customised to the customer’s process. The scanner was used successfully during the development of the robot that transported the EUV masks in the first EUV wafersteppers of ASML, and in the manufacture of image sensors.

Besides on the particle contamination TNO is working on several high-end metrology system together with their partners. These metrology systems are made for fast overlay and alignment detection.

Scientific interests

  • optical design, high resolution imaging
  • Semicon system metrology and inspection

Expertise:

  • Optical design for high precision advanced optical system.
  • Wave optics modeling of nano scattering events and phenomena.

Models and equipment:

  • Optical design and modelling tools
  • Rapid Nano nano-particle inspection tool
Share this page
Share on twitter
Share on linkedin
Share on print
Share on email

Rob Jansen

TNO
Group
Optics
Faculty
TNO Industry
Email

Daan Brinks

TU Delft
Group
IMPHYSNeurophotonics
Faculty
TNW
Email

Bernd Rieger

TU Delft
Group
IMPHYS
Faculty
TNW
Email

Andrei Anisimov

TU Delft
Group
Non-Destructive TEsting
Faculty
Aerospace
Email

Alexis Bohlin

TU Delft
Group
Ultrafast Laser Diagnostics Laboratory
Faculty
Aerospace
Email

Aurel Adam

TU Delft
Group
Optics
Faculty
TNW
Email