EBL2, EUV exposure and analysis facility

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Since 2000 TNO has been active in EUV material interaction research, developing the 2nd generation EUV exposure and in-situ surface analysis facility – dubbed EBL2 – to accommodate the ASML power roadmap. This system will give customers the opportunity to evaluate their materials/components in terms of NXE-relevant EUV irradiation and environmental conditions in order to address contamination and lifetime challenges.


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