Brightest EUV source for LINX project

Share this page
Share on twitter
Share on linkedin
Share on print
Share on email

The Optics Research Group of the TU Delft recently installed a Soft X-Ray source based on High Harmonic Generation as part of the LINX consortium. The new coherent source will be a platform to test innovative 3D lensless imaging techniques. Lensless imaging allows us to “see” very small features, on for example next-generation computer chips, of roughly the same size as the wavelength of the Soft X-Rays themselves (8 up to 30 nanometer). The LINX consortium aims to improve this resolution by a factor ten. The video below shows a rendered impression of the source itself and its application. 

The academic world and the industry relied on synchrotrons for coherent EUV and Soft X-Rays which are not within the reach for many. Recent innovations in laser technology led to commercial table top systems. Consortium partner Active Fiber Systems, spin-off company of University of Jena, recently installed this compact source at the Optics Research Group being the brightest source of its kind at the moment. This new source enables a lot of new opportunities by opening up a new wavelength range for optical metrology at the Delft Research Optics group.

In the coming years this setup will be made available for use by industry as a shared DOC facility. 

If you are interested and want to know more about the new Soft X-Ray source or the LINX project, please contact Sven Weerdenburg or visit the LINX website

Upcoming Events
Contact us for starting a project