Brightest EUV source for LINX project

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The Optics Research Group of the TU Delft recently installed a Soft X-Ray source based on High Harmonic Generation as part of the LINX consortium. The new coherent source will be a platform to test innovative 3D lensless imaging techniques. Lensless imaging allows us to “see” very small features, on for example next-generation computer chips, of roughly the same size as the wavelength of the Soft X-Rays themselves (8 up to 30 nanometer). The LINX consortium aims to improve this resolution by a factor ten. The video below shows a rendered impression of the source itself and its application. 

The academic world and the industry relied on synchrotrons for coherent EUV and Soft X-Rays which are not within the reach for many. Recent innovations in laser technology led to commercial table top systems. Consortium partner Active Fiber Systems, spin-off company of University of Jena, recently installed this compact source at the Optics Research Group being the brightest source of its kind at the moment. This new source enables a lot of new opportunities by opening up a new wavelength range for optical metrology at the Delft Research Optics group.

In the coming years this setup will be made available for use by industry as a shared DOC facility. 

If you are interested and want to know more about the new Soft X-Ray source or the LINX project, please contact Sven Weerdenburg or visit the LINX website

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